NON-CONTACT THICKNESS MEASURING DEVICE
OZUMA CL
(For Wafers Thickness Measurement )
<USE>
High precision Thickness Measurement for wafers like Si(silicon) and GaAs(gallium
arsenide) for sem-iconductorsand metals.
<FEATURES>
1.Non-contact thickness measurement is possible with the laser method,
and it does not cause damage such as scratches and contamination.
2.High precision non-contact thickness measurement possible.
3.Repeated thickness, warpage, parallelism, etc. can be measured.
4.Since the measurement is performed with the laser sensor heads placed
opposite each other, the thickness can be measured accurately without being
affected by the lift of the object being measured.
<PERFORMANCE>
Resolution 0.01μm
Range of thickness measurement Max.10mm
Power supply AC100V 50/60Hz 3A
Weight: Approximately10kg
<SYSTEM BREAKDOWN>
Standard system consists of the following equipments:
① Thickness measuring equipment 1set
② Table (to be selected from several tables for your needs) 1set
③ Control box 1set
④ Switch box 1set
⑤ Display unit (7" color LCD touch panel) or laptop PC for measuring
control 1set
⑥ Connecting cables. 1set
⑦ Fine adjustment gauge (Select thickness) 1 peace
⑧ Standard software for measuring control 1set
and more options are available for your own use.
<Dimension Drawings>
(Remarks)
*1 It may not be possible to measure curvatures depending on the curvature
level and stiffness.Please contact us for further information.
<Customization Request>
Please contact us if you need other special specifications.
NON-CONTACT THICKNESS MEASURING DEVICE
<Send your inquiries to>
Sasaki-koki, Co, INC.
TOP
SASAKI KOKI Inc.
1-9-33 Shinomoge, Takatsu-ku, Kwasaki City, Kanagawa Pref. Zip-Code 213-0006
Japan
TEL +81-44-844-0338 FAX +81-44-822-0922
E-MAIL to here U.R.L. http://www.sasaki-koki.co.jp
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