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NON-CONTACT
THICKNESS MEASURING DEVICE
OZUMA22
(For Wafers and
Glasses Thickness Measurement )
＜USE＞
High precision Thickness Measurement for wafers
like Si(silicon) and GaAs(gallium arsenide) for sem-iconductors,
glasses and metals.
＜FEATURES＞
| 1. |
Air reflection measuring system. The thickness
of the object can be measured by air feedingwithout hard material
touching the object. Therefore, there is no risk of damaging
the surfaceof the measuring object. |
| 2. |
Accurate measuring is possible by eliminating the effects
of surface color and reflection of thin metal and insulation
films.
|
| 3. |
Measuring is possible with wet object. |
| 4. |
Accurate measuring is possible with mirror surface,
transparent and translucent objects. |
| 5. |
More accurate measuring is possible for curved
surface objects, because our system usesthe upper and lower
nozzles for thickness measuring. |
| |
(Can measure the curvature with optional tool and software.
(*1) )
|
| 6. |
Can do measuring and fine adjustment of measuring
parameters(*2) easily and simply. |
＜PERFORMANCE＞
Resolution 0.1μｍ
Repetition accuracy In the case 10 times continuous measuring
is done,
Standard deviation(1σ) Less than 0.3μｍ
Range of thickness measurement. max.10mm (*3)
Power supply AC100V 50/60Hz 3A
Air supply Clean air 0.4MPa 20NL/min. (*4)
<SYSTEM BREAKDOWN>
Standard system consists of the following equipments:
| ① |
Thickness measuring equipment |
1set
|
| ② |
Table (to be selected from several tables for
your needs) |
1set
|
| ③ |
Control box |
1set
|
| ④ |
Switch box |
1set
|
| ⑤ |
Display unit (7" color LCD touch panel) or
laptop PC for measuring control |
1set
|
| ⑥ |
Connecting cables. |
1set
|
| ⑦ |
Fine adjustment gauge (Select thickness) |
1 peace
|
| ⑧ |
Standard software for measuring control |
1set
|
and more options are available for your own use.
<Dimension Drawings>
This is the set up for measuring 300mm waferwith Y-axis table.
Separate control box dimensions: 400x500x250 mm (W/H/D)
(Remarks)
| *1 |
It may not be possible to measure curvatures
depending on the curvature level and stiffness.Please contact
us for further information. |
| *2 |
For fine adjustment of measuring parameters, standard
blockgauges can also be used. |
| *3 |
The range of the thickness measuring is within
10mm(max.). |
NON-CONTACT
THICKNESS MEASURING DEVICE
(For
Wafers and Glasses Thickness Measurement )
List of table choices
and Optional accessory list
＜Choice of table for standard
system>
Choose one table from the table list down below.
|
Table Type
|
Code |
| Stationary type |
TK☆-△ |
|
Manual type Y table (moves back and forｔｈ)
|
TMY☆-△ |
| Manual type Y-θtable (moves back and forth and
rotates ±120°) |
TMYR☆-△ |
| Manual type X-Y table (moves back and for the, right and
left) |
TMXY☆-△ |
| Automatic type Y table (moves back and forth)
|
TAY☆-△ |
| Automatic type Y-θ table (moves back and forth and rotates
±120°) |
TAYR☆-△ |
| Automatic type X-Y table (moves back and for the, right
and left) |
TAXY☆-△ |
| Custom made version (*Q) |
TZ |
☆Size (Item code ) △Material (Item code )
| Size (Item code ) |
２（０．５～２”）、５（３～５”）、８（５～８”）、１２（８～１２”） |
| Material (Item code ) |
A（Aluminum/Alumite plating）、P（POM）、E（PEEK）、S（SUS）、 |
| |
F（PTFE）、J（CERAMICS）、Q（Special specification） |
＜Options＞
|
Option Name
|
Option Type
|
Details
|
| Vacuum table |
ＶＮ.. |
Adsorption function is added to each
table.(*1) |
| Laser marker |
ＬＭ.. |
IPoint the target of measuring location by laser marker.
|
Software for thickness distribution
display
|
ＤＲ.. |
Three-dimensional graphic display of thickness distribution
when measuring is done at multiple points.
|
| Curvature measuring kit |
ＷＰ.. |
Software and hardware for curvature measuring
|
| Customer's selected display format |
ＦＭ.. |
Measurement data can be displayed in accordance with customer's
selected format.
|
| Data transfer software |
ＬＮ.. |
IMeasurement data can be transferred to PC.
|
Bar code reader
|
ＢＲ.. |
Measurement data can be tied with bar code information. （*2）
|
| Printer |
ＰＲ.. |
A measuring result is printed.
|
Ultra-thin nozzle
|
ＳＮ.. |
Using ultra-thin nozzle, it can measure small spots or grooves,
such as the thickness measurement of MEMS..
|
| Supply air refining apparatus |
ＤＡ.. |
Air refining apparatus, having air dryer and filter.
|
Vacuum generator
|
ＶＳ.. |
Vacuum generating apparatus for adsorption.（*3）
|
ＣtoＣ automatic conveyance
|
ＣＺ.. |
It is a full automatic calculating system. （*4）
|
| Fine adjustment gauge & Certificates |
ＧＳ.. |
A package of certificates for inspection, fine adjustment
of measuring parameters and traceability.
|
| Export conformity document |
ＥＤ.. |
Issuance of conformity document for export
|
Maintenance service contract
|
ＭＴ.. |
Annual inspection and maintenance service for five years
|
（*1）The source of a vacuum is not included in VN. You have to have
your own vacuum line.
（*2）need to get FM option.
（*3）need to get VN option.
（*4）Separate discussion should be done to finalize detailed requirements
of customers.
＜ＯＺＵＭＡ２２ Form notation
＞
ＯＺＵＭＡ２２－Table Type－Option Type－Option Type－・・・
（Example） ＯＺＵＭＡ２２－ＴＭＹ５－Ａ－ＶＮ－ＦＭ
＜Customization Request＞
Please contact us when you need special customization of the
systemfor your specific needs.
2012.01.06 Ver.1
＜Send your inquiries to＞
Sasaki-koki,
Co, INC.
about NON-CONTACT
THICKNESS MEASURING DEVICE
(For Wafers and
Glasses Thickness Measurement )
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